Semicera Semiconductor is a leading supplier specializing in wafer and advanced semiconductor consumables.We are dedicated to providing high-quality, reliable, and innovative products to semiconductor manufacturing,photovoltaic industryand other related fields.Our product line includes SiC/TaC coated graphite products and ceramic products, encompassing various materials such as silicon carbide, silicon nitride, and aluminum oxide and etc.As a trusted supplier, we understand the importance of consumables in the manufacturing process, and we are committed to delivering products that meet the highest quality standards to fulfill our customers’ needs.
Productbeschrijving
Our company provides SiC coating process services by CVD method on the surface of graphite, ceramics and other materials, so that special gases containing carbon and silicon react at high temperature to obtain high purity SiC molecules, molecules deposited on the surface of the coated materials, forming SIC protective layer.
Hoofdkenmerken:
1. Oxidatieweerstand op hoge temperatuur:
De oxidatieweerstand is nog steeds erg goed als de temperatuur zo hoog is als 1600 C.
2. High purity : made by chemical vapor deposition under high temperature chlorination condition.
3. Erosiebestendigheid: hoge hardheid, compact oppervlak, fijne deeltjes.
4. Corrosieweerstand: zuur, alkali, zout en organische reagentia.
Hoofdspecificaties van CVD-SIC-coating
|
SIC-CVD-eigenschappen |
||
|
Kristalstructuur |
FCC β -fase |
|
|
Dikte |
g/cm ³ |
3.21 |
|
Hardheid |
Vickers Hardheid |
2500 |
|
Korrelgrootte |
mm |
2~10 |
|
Chemische zuiverheid |
% |
99.99995 |
|
Warmtecapaciteit |
J · kg-1 · K-1 |
640 |
|
Sublimatietemperatuur |
℃ |
2700 |
|
Felexurale kracht |
MPA (RT 4-punts) |
415 |
|
Young’ s Modulus |
GPA (4pt Bend, 1300 ℃) |
430 |
|
Thermische expansie (CTE) |
10-6K-1 |
4.5 |
|
Thermische geleidbaarheid |
(W/mk) |
300 |
