Semicera’s Graphite Susceptor with Silicon Carbide Coating for 8-inch Wafer Carrier is designed for high-performance semiconductor processing, providing excellent thermal conductivity, chemical resistance, and durability. The silicon carbide coating ensures superior protection against oxidation and wear, enhancing the lifespan of the susceptor. Ideal for MOCVD, CVD, and other high-temperature applications, Semicera’s susceptor offers reliable performance, making it the perfect solution for efficient wafer handling and processing in semiconductor and LED manufacturing.
CVD-SiC coating has the characteristics of uniform structure, compact material, high temperature resistance, oxidation resistance, high purity, acid&alkali resistance and organic reagent, with stable physical and chemical properties.
Compared with high-purity graphite materials, graphite begins to oxidize at 400C, which will cause a loss of powder due to oxidation, resulting in environmental pollution to peripheral devices and vacuum chambers, and increase impurities of high-purity environment.
However, SiC coating can maintain physical and chemical stability at 1600 degrees, It is widely used in modern industry, especially in semiconductor industry.
1 .High purity SiC coated graphite
2. Superior heat resistance & thermal uniformity
3. Fine SiC crystal coated for a smooth surface
4. High durability against chemical cleaning
| SiC-CVD | ||
| Density | (g/cc) | 3.21 |
| Flexural strength | (Mpa) | 470 |
| Thermal expansion | (10-6/K) | 4 |
| Thermal conductivity | (W/mK) | 300 |
Supply Ability:
10000 Piece/Pieces per Month
Packaging & Delivery:
Packing:Standard & Strong Packing
Poly bag + Box + Carton + Pallet
Port:
Ningbo/Shenzhen/Shanghai
Lead Time:
| Quantity(Pieces) | 1 – 1000 | >1000 |
| Est. Time(days) | 30 | To be negotiated |
