Long-life SiC Coated Graphite Heater for MOCVD K465i, Graphite Heater for epitaxy

The graphite heater components are used in the high temperature furnace with temperature reached 2200 degrees at vacuum environment and 3000 degrees in the deoxidized and inserted gas environment.

Description

The graphite heater components are used in the high temperature furnace with temperature reached 2200 degrees at vacuum environment and 3000 degrees in the deoxidized and inserted gas environment.

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Main Features

1. Uniformiteit van de verwarmingsstructuur.
2. Goede elektrische geleidbaarheid en hoge elektrische belasting.
3. Corrosieweerstand.
4. Inoxidizeerbaarheid.
5. Hoge chemische zuiverheid.
6. Hoge mechanische sterkte.
The advantage is energy efficient, high value and low maintenance.
We can produce anti-oxidation and long life span graphite crucible, graphite mold and all parts of graphite heater.

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Hoofdparameters van grafietverwarming

Technische specificatie

VET-M3

Bulkdichtheid (g/cm3)

≥1.85

Ash -inhoud (PPM)

≤500

Oever hardheid

≥45

Specifieke weerstand (μ.Ω.M)

≤12

Buigsterkte (MPA)

≥40

Compressieve sterkte (MPA)

≥70

Max. Korrelgrootte (μm)

≤43

Coëfficiënt van thermische expansie mm/° C

≤4.4*10-6

Graphite heater for electric furnace has properties of heat resistance, oxidation resistance, good electrical conductivity and better mechanical intensity. We can machine various types of graphite heater according to customers’ designs.

Semicera werkplek

Semicera werkplek 2

Apparatuurmachine

CNN -verwerking, chemische reiniging, CVD -coating

Semicera Ware House

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