Long Service Life SiC Coated Graphite Carrier For Solar Wafer

Silicon carbide is a new type of ceramics with high cost performance and excellent material properties. Due to features like high strength and hardness, high temperature resistance, great thermal conductivity and chemical corrosion resistance, Silicon Carbide can almost withstand all chemical medium. Therefore, SiC are widely used in oil mining, chemical, machinery and airspace, even nuclear energy and the military have their special demands on SIC. Some normal application we can offer are seal rings for pump, valve and protective armor etc.

Advantages

Oxidatieweerstand op hoge temperatuur
Uitstekende corrosieweerstand
Goede slijtvastheid
Hoge warmtecoëfficiëntgeleidbaarheid
Zelfmacht, lage dichtheid
Hoge hardheid
Aangepast ontwerp.

HGF (2)
HGF (1)

Applications

-Wear-resistent veld: bus, plaat, zandstraalmondstuk, cycloon voering, slijpvat, enz…
-Hoogtemperatuurveld: SIC -plaat, blussende ovenbuis, stralende buis, smeltkroes, verwarmingselement, roller, balk, warmtewisselaar, koude luchtpijp, brandermondstuk, thermokoppelbeveiligingsbuis, SIC -boot, ovenautostructuur, setter, enz.
-Siliconencarbide halfgeleider: sic wafer boot, sic chuck, sic paddle, sic cassette, sic diffusiebuis, wafers vork, zuigplaat, leidingway, enz.
-Silicium carbide afdichtingsveld: allerlei afdichtingsring, lager, bus, etc.
-Fotovoltaïsch veld: Cantilever -paddle, slijpvat, siliciumcarbide -roller, enz.
-Lithium -batterijveld

WAFER (1)

WAFER (2)

Physical Properties Of SiC

Eigendom Waarde Method
Dikte 3.21 g/cc Sink-float and dimension
Specific heat 0.66 J/g °K Pulsed laser flash
Buigsterkte 450 MPa560 MPa 4 point bend, RT4 point bend, 1300°
Fracture toughness 2.94 MPa m1/2 Microindentation
Hardheid 2800 Vicker’s, 500g load
Elastic ModulusYoung’s Modulus 450 GPa430 GPa 4 pt bend, RT4 pt bend, 1300 °C
Grain size 2 – 10 µm SEM

Thermal Properties Of SiC

Thermal Conductivity 250 W/m °K Laser flash method, RT
Thermal Expansion (CTE) 4.5 x 10-6 °K Room temp to 950 °C, silica dilatometer

Technische parameters

Item Eenheid Data
RBSiC(SiSiC) NBSiC SSiC RSiC OSiC
SiC content % 85 75 99 99.9 ≥99
Free silicon content % 15 0 0 0 0
Max service temperature 1380 1450 1650 1620 1400
Dikte g/cm3 3.02 2.75-2.85 3.08-3.16 2.65-2.75 2.75-2.85
Open porosity % 0 13-15 0 15-18 7-8
Bending strength 20℃ Мpa 250 160 380 100 /
Bending strength 1200℃ Мpa 280 180 400 120 /
Modulus of elasticity 20℃ Gpa 330 580 420 240 /
Modulus of elasticity 1200℃ Gpa 300 / / 200 /
Thermal conductivity 1200℃ W/m.K 45 19.6 100-120 36.6 /
Thermische expansiecoëfficiënt K-1X10-6 4.5 4.7 4.1 4.69 /
HV Kg/mm2 2115 / 2800 / /

The CVD silicon carbide coating on the outer surface of recrystallized silicon carbide ceramic products can reach a purity of more than 99.9999% to meet the needs of customers in the semiconductor industry.

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CNN -verwerking, chemische reiniging, CVD -coating
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