Semiconductor Cassette

Semiconductor Cassette– Protect and transport your wafers with precision using Semicera’s Semiconductor Cassette, designed to ensure optimal safety and efficiency in high-tech manufacturing environments.

Semicera introduces the Semiconductor Cassette, an essential tool for the secure and efficient handling of wafers throughout the semiconductor manufacturing process. Engineered with high precision, this cassette ensures that your wafers are safely stored and transported, maintaining their integrity at every stage.

Superior Protection and Durability The Semiconductor Cassette from Semicera is built to offer maximum protection to your wafers. Constructed from robust, contamination-resistant materials, it shields your wafers from potential damage and contamination, making it an ideal choice for cleanroom environments. The cassette’s design minimizes particulate generation and ensures that wafers remain untouched and secure during handling and transportation.

Enhanced Design for Optimal Performance Semicera’s Semiconductor Cassette features a meticulously engineered design that provides precise wafer alignment, reducing the risk of misalignment and mechanical damage. The cassette’s slots are perfectly spaced to hold each wafer securely, preventing any movement that could result in scratches or other imperfections.

Versatility and Compatibility The Semiconductor Cassette is versatile and compatible with various wafer sizes, making it suitable for different stages of semiconductor fabrication. Whether you’re working with standard or custom wafer dimensions, this cassette adapts to your needs, offering flexibility in your manufacturing processes.

Streamlined Handling and Efficiency Designed with the user in mind, the Semicera Semiconductor Cassette is lightweight and easy to handle, allowing for quick and efficient loading and unloading. This ergonomic design not only saves time but also reduces the risk of human error, ensuring smooth operations within your facility.

Meeting Industry Standards Semicera ensures that the Semiconductor Cassette meets the highest industry standards for quality and reliability. Each cassette undergoes rigorous testing to guarantee that it performs consistently under the demanding conditions of semiconductor manufacturing. This dedication to quality ensures that your wafers are always protected, maintaining the high standards required in the industry.

Items

Productie

Onderzoek

Stom

Kristalparameters

Polytype

4H

Oppervlakte -oriëntatiefout

4±0.15°

Elektrische parameters

Dopant

n-type stikstof

Weerstand

0.015-0.025OHM · cm

Mechanische parameters

Diameter

150,0 ± 0,2 mm

Dikte

350 ± 25 µm

Primaire platte oriëntatie

[1-100]±5°

Primaire platte lengte

47,5 ± 1,5 mm

Secundaire flat

Geen

TTV

≤5 µm

≤10 µm

≤15 µm

LTV

≤3 μm (5 mm*5 mm)

≤5 μm (5 mm*5 mm)

≤10 μm (5 mm*5 mm)

Boog

-15 μm ~ 15 μm

-35 μm ~ 35 μm

-45μm ~ 45 urm

Kronkelen

≤35 µm

≤45 µm

≤55 µm

Voorste (si-face) ruwheid (AFM)

Ra≤0,2 nm (5μm*5μm)

Structuur

Micropipe dichtheid

<1 EA/CM2

<10 EA/CM2

<15 EA/CM2

Metaalonzuiverheden

≤5E10atoms/cm2

NA

BPD

≤1500 EA/CM2

≤3000 EA/CM2

NA

TSD

≤500 EA/CM2

≤1000 EA/CM2

NA

Voorste kwaliteit

Voorkant

Si

Oppervlakte -afwerking

Si-face CMP

Deeltjes

≤60EA/wafer (grootte ≥ 0,3 μm)

NA

Krassen

≤5EA/mm. Cumulatieve lengte ≤diameter

Cumulatieve lengte ≤2*diameter

NA

Sinaasappelschil/putten/vlekken/strepen/scheuren/besmetting

Geen

NA

Edge -chips/inspringen/breuk/hexplaten

Geen

Polytype -gebieden

Geen

Cumulatief gebied ≤20%

Cumulatief gebied ≤30%

Laser markering vooraan

Geen

Rugkwaliteit

Back Finish

C-gezicht CMP

Krassen

≤5ea/mm, cumulatieve lengte ≤2*diameter

NA

Achterafwijkingen (randchips/inspringen)

Geen

Terug ruwheid

Ra≤0,2 nm (5μm*5μm)

Lasergrondbekleding

1 mm (van bovenrand)

Rand

Rand

Schuif

Verpakking

Verpakking

Epi-ready met vacuümverpakkingen

Multi-wafer cassette verpakking

*OPMERKINGEN: "NA" betekent dat er geen aanvraagitems die niet worden genoemd, verwijzen naar semi-STD.

tech_1_2_size

Sic wafels

Nieuwbrief

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