Semicera’s SiC Pin Trays for ICP Etching Processes in the LED Industry are specifically designed to enhance efficiency and precision in etching applications. Made from high-quality silicon carbide, these pin trays offer excellent thermal stability, chemical resistance, and mechanical strength. Ideal for the demanding conditions of the LED manufacturing process, Semicera’s SiC pin trays ensure uniform etching, minimize contamination, and improve overall process reliability, contributing to high-quality LED production.
Productbeschrijving
Our company provides SiC coating process services by CVD method on the surface of graphite, ceramics and other materials, so that special gases containing carbon and silicon react at high temperature to obtain high purity SiC molecules, molecules deposited on the surface of the coated materials, forming SIC protective layer.
Hoofdkenmerken:
1. Oxidatieweerstand op hoge temperatuur:
De oxidatieweerstand is nog steeds erg goed als de temperatuur zo hoog is als 1600 C.
2. High purity : made by chemical vapor deposition under high temperature chlorination condition.
3. Erosiebestendigheid: hoge hardheid, compact oppervlak, fijne deeltjes.
4. Corrosieweerstand: zuur, alkali, zout en organische reagentia.
Hoofdspecificaties van CVD-SIC-coating
|
SIC-CVD-eigenschappen |
||
|
Kristalstructuur |
FCC β -fase |
|
|
Dikte |
g/cm ³ |
3.21 |
|
Hardheid |
Vickers Hardheid |
2500 |
|
Korrelgrootte |
mm |
2~10 |
|
Chemische zuiverheid |
% |
99.99995 |
|
Warmtecapaciteit |
J · kg-1 · K-1 |
640 |
|
Sublimatietemperatuur |
℃ |
2700 |
|
Felexurale kracht |
MPA (RT 4-punts) |
415 |
|
Young’ s Modulus |
GPA (4pt Bend, 1300 ℃) |
430 |
|
Thermische expansie (CTE) |
10-6K-1 |
4.5 |
|
Thermische geleidbaarheid |
(W/mk) |
300 |
