The Tantalum Carbide Coated Wafer Carrier by Semicera Semiconductor is engineered for high performance in semiconductor manufacturing. Featuring a robust tantalum carbide coating, it ensures exceptional wear resistance, high thermal stability, and superior protection in harsh environments. Ideal for MOCVD processes, this carrier enhances wafer processing efficiency, extends equipment lifespan, and delivers consistent results in critical applications.
Semicera biedt gespecialiseerde tantalum carbide (TAC) coatings voor verschillende componenten en dragers. Semicera toonaangevend coatingproces stelt tantalum carbide (TAC) coatings in staat om een hoge zuiverheid, stabiliteit met hoge temperatuur en hoge chemische tolerantie te bereiken, de productkwaliteit van SIC/GAN -kristallen en EPI -lagen te verbeteren ((Graphiet gecoate TAC Susceptor) en de levensduur van belangrijke reactorcomponenten verlengen. Het gebruik van tantalum carbide -taccoating is om het randprobleem op te lossen en de kwaliteit van de kristalgroei te verbeteren, en semicera heeft doorbraak de tantalum carbide coatingtechnologie (CVD) opgelost, waardoor het internationale geavanceerde niveau wordt bereikt.
Tantalum carbide coated wafer carriers are widely used in wafer processing and handling processes in semiconductor manufacturing processes. They provide stable support and protection to ensure the safety, accuracy and consistency of wafers during the manufacturing process. Tantalum carbide coatings can extend the service life of the carrier, reduce costs, and improve the quality and reliability of semiconductor products.
Description of tantalum carbide coated wafer carrier is as follows:
1. Material selection: Tantalum carbide is a material with excellent performance, high hardness, high melting point, corrosion resistance and excellent mechanical properties, so it is widely used in semiconductor manufacturing process.
2. Surface coating: Tantalum carbide coating is applied to the surface of wafer carrier through a special coating process to form a uniform and dense tantalum carbide coating. This coating can provide additional protection and wear resistance, while having good thermal conductivity.
3. Flatness and precision: Tantalum carbide coated wafer carrier has a high degree of flatness and precision, ensuring the stability and accuracy of wafers during the manufacturing process. The flatness and finish of the carrier surface are critical to ensure the quality and performance of the wafer.
4. Temperature stability: Tantalum carbide coated wafer carriers can maintain stability in high temperature environments without deformation or loosening, ensuring the stability and consistency of wafers in high temperature processes.
5. Corrosion resistance: Tantalum carbide coatings have excellent corrosion resistance, can resist the erosion of chemicals and solvents, and protect the carrier from liquid and gas corrosion.
Bovendien, Semicera's TAC-gecoate producten een langere levensduur en een grotere weerstand van hoge temperatuur vertonen in vergelijking met Sic coatings. Laboratoriummetingen hebben aangetoond dat onze TAC -coatings Kan consequent presteren bij temperaturen tot 2300 graden Celsius voor langere periodes. Hieronder staan enkele voorbeelden van onze monsters:
