In the semiconductor IC manufacturing process, it is often necessary to use a tool for chip transfer, cleaning and processing, the tool that carries the chip is generally called the wafer boat, which will be provided with a number of wafer slots, each wafer slot is used to place a wafer. In the manufacturing process of semiconductor wafers, the diffusion process of the furnace tube is one of the basic processes. In the diffusion process, multiple wafers are first placed on a quartz crystal boat, and then the quartz crystal boat is placed in the furnace tube for batch manufacturing.
