No processo de fabricação semicondutores de IC, geralmente é necessário usar uma ferramenta para transferência, limpeza e processamento de chips, a ferramenta que carrega o chip é geralmente chamada de barco de wafer, que será fornecido com vários slots de wafer, cada slot de wafer é usado para colocar uma bolacha. No processo de fabricação das bolachas de semicondutores, o processo de difusão do tubo do forno é um dos processos básicos. No processo de difusão, várias bolachas são colocadas pela primeira vez em um barco de cristal de quartzo e, em seguida, o barco de cristal de quartzo é colocado no tubo do forno para fabricação de lote.
Advantages of quartz are as follows:
1, high temperature resistance. The softening point temperature of quartz glass is about 1730 ° C, which can be used for a long time at 1150 ° C, and the maximum temperature for a short time can reach 1450 ° C.
2, corrosion resistance. In addition to hydrofluoric acid, high purity quartz almost does not react with other acid substances, at high temperatures, it can resist sulfuric acid, nitric acid, hydrochloric acid, aqua royalty, neutral salts, carbon and sulfur erosion. Its acid resistance is 30 times that of ceramics, 150 times that of stainless steel, especially its chemical stability at high temperatures, which is unmatched by any other engineering material.
3, good thermal stability. The coefficient of thermal expansion of high purity quartz is very small, can withstand intense temperature changes, the high purity quartz is heated to about 1100℃, and will not burst into normal temperature water.
4, good light transmission performance. High purity quartz has good light transmission performance in the entire spectral band from ultraviolet to infrared, visible light transmittance of more than 93%, especially in the ultraviolet spectral region, ~ large light transmittance of more than 80%.
5, good electrical insulation performance. The resistance value of high-purity quartz is equivalent to 10,000 times that of ordinary quartz glass, which is an excellent electrical insulation material and has good electrical properties even at high temperatures.
In order to meet customer needs, Semicera Energy can produce a variety of quartz products, relying on the three core technical advantages of precision processing technology, welding technology, surface treatment (cleaning) technology and the support of professional technical team with global vision, tailor-made high-quality products for customers.
