LED etch Silicon carbide bearing tray,ICP tray (Etch)

Semicera Semiconductor is a leading supplier specializing in wafer and advanced semiconductor consumables.We are dedicated to providing high-quality, reliable, and innovative products to semiconductor manufacturing,photovoltaic industryand other related fields.Our product line includes SiC/TaC coated graphite products and ceramic products, encompassing various materials such as silicon carbide, silicon nitride, and aluminum oxide and etc.As a trusted supplier, we understand the importance of consumables in the manufacturing process, and we are committed to delivering products that meet the highest quality standards to fulfill our customers’ needs.

Product Description

Our company provides SiC coating process services by CVD method on the surface of graphite, ceramics and other materials, so that special gases containing carbon and silicon react at high temperature to obtain high purity SiC molecules, molecules deposited on the surface of the coated materials, forming SIC protective layer.

Main features:

1. Resistência a oxidação de alta temperatura:

A resistência da oxidação ainda é muito boa quando a temperatura é tão alta quanto 1600 C.

2. High purity : made by chemical vapor deposition under high temperature chlorination condition.

3. Resistência à erosão: alta dureza, superfície compacta, partículas finas.

4. Resistência à corrosão: ácido, álcalis, sal e reagentes orgânicos.

Principais especificações do revestimento CVD-SIC

Propriedades SIC-CVD

Estrutura cristalina

Fase β da FCC

Densidade

g/cm ³

3.21

Dureza

Vickers dureza

2500

Tamanho de grão

mm

2~10

Pureza química

%

99.99995

Capacidade de calor

J · kg-1 · k-1

640

Temperatura da sublimação

2700

Força felexural

MPA (RT 4 pontos)

415

Young’ s Modulus

GPA (4pt Bend, 1300 ℃)

430

Expansão térmica (CTE)

10-6K-1

4.5

Condutividade térmica

(W/mk)

300

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