Pyrolytic carbon coating high-purity hard felt ring

Semicera’s Pyrolytic Carbon Coated High-Purity Hard Felt Ring is engineered for superior performance in high-temperature semiconductor applications. This advanced component features a high-purity hard felt base coated with pyrolytic carbon, offering outstanding wear resistance, thermal stability, and chemical durability. Ideal for use in demanding environments, this ring ensures reliable and efficient operation in processes requiring precise temperature control and material purity.

Pyrolytic carbon coating is a thin layer of pyrolytic carbon coated on the surface of highly purified isostatic graphite using chemical vapor deposition (CVD) technology. It has high density, high purity, and anisotropic thermal, electrical, magnetic, and mechanical properties.

Mainfeatures：

1. The surface is dense and free of pores.

2. High purity, total impurity content<20ppm,good airtightness.

3. High temperature resistance, strength increases with increasing usage temperature, reaching the highest value at 2750 ℃,sublimation at 3600 ℃.

4. Low elastic modulus, high thermal conductivity, low thermal expansion coefficient, and excellent thermal shock resistance.

5. Good chemical stability, resistant to acid, alkali, salt, and organic reagents, and has no effect on molten metals, slag, and other corrosive media. It does not oxidize significantly in the atmosphere below 400 ℃, and the oxidation rate significantly increases at 800 ℃.

6. Without releasing any gas at high temperatures, it can maintain a vacuum of 10-7mmHg at around 1800 ℃.