Silicon Carbide Vacuum Chuck and Wafer Handling Arm is formed by isostatic pressing process and high temperature sintering. The external dimensions, thickness and shapes can be finished according to the user’s design drawings to meet the user’s specific requirements.
Silicon carbide vacuum chuck is a key component used in semiconductor manufacturing and precision industrial applications for grabbing, handling and positioning thin and fragile workpieces such as wafers, glass substrates and optical components. It uses vacuum force to create negative pressure, allowing it to firmly adhere to the surface of the workpiece and release when needed. Silicon carbide vacuum chucks are widely used in semiconductor manufacturing, flat panel displays, optical manufacturing and other precision industrial fields. They can be used for operations such as wafer loading and transfer, substrate alignment, glass plate grabbing and handling, providing high-precision, high-stability and safe workpiece handling solutions.
The characteristics of silicon carbide vacuum chucks are as follows:
1. High temperature resistance: Silicon carbide has excellent high temperature stability and can operate for a long time in a high temperature environment without damage, which is suitable for processes that require high temperature processing.
2. High hardness and wear resistance: Silicon carbide has high hardness and can resist friction and wear, increasing the durability and life of the chuck.
3. Excellent chemical inertness: Silicon carbide has high resistance to a variety of chemicals and solvents and can work stably in chemical environments.
4. High vacuum sealing: Silicon carbide vacuum suction cups can provide reliable vacuum sealing, ensuring stable adsorption force and safe grasping of workpieces.
Somos capazes de projetar e fabricar de acordo com suas dimensões específicas, com boa qualidade e entrega razoável de tempo.
Resistência a oxidação de alta temperatura
Excelente resistência à corrosão
Boa resistência à abrasão
Alto coeficiente de condutividade térmica
Auto-lubrificação, baixa densidade
Alta dureza
Design personalizado.
-Campo resistente ao desgaste: bucha, placa, bico de areia, forro de ciclone, barril de moagem, etc.…
-Campo de alta temperatura: laje SiC, tubo do forno de extinção, tubo radiante, cadinho, elemento de aquecimento, rolo, feixe, trocador de calor, tubo de ar frio, bico de queimador, tubo de proteção de termoples, barco sic, estrutura do carro do forno, setter, etc.
-Campo de balas militar
-Semicondutor de carboneto de silício: barco de bolacha sic, chuck sic, sic paddle, cassete sic, tubo de difusão sic, garfo de wafer, placa de sucção, guia, etc.
-Campo de vedação de carboneto de silício: todos os tipos de anel de vedação, rolamento, bucha, etc.
-Campo fotovoltaico: remar em cantilever, barril de moagem, rolo de carboneto de silício, etc.
-Campo da bateria de lítio
