セミセラ is a supplier specializing in wafer-related and advanced semiconductor consumables. We are committed to providing high-quality, reliable, and innovative products for semiconductor manufacturing, the photovoltaic industry, and other related high-tech fields.
Our product portfolio includes SiC/TaC coated graphite components and advanced technical ceramics, covering materials such as silicon carbide (SiC), silicon nitride (Si₃N₄), and aluminum oxide (Al₂O₃), among others.
As a trusted supplier in the industry, Semicera understands the critical role of consumables in semiconductor production processes. Semicera are dedicated to delivering products that meet stringent quality standards and support the performance, stability, and efficiency required in advanced manufacturing environments.
当社は提供しています CVD SiC coating services on the surface of graphite, ceramics, and other advanced substrate materials. During the process, silicon- and carbon-containing precursor gases react at high temperatures to generate high-purity silicon carbide (SiC), which is deposited onto the substrate surface to form a dense, uniform, and strongly bonded SiC protective layer.
This coating significantly improves the surface properties of the base material, enhancing its performance under high-temperature, corrosive, and high-purity process environments.
1. High-temperature oxidation resistance
Stable performance under high-temperature conditions up to 1600°C in inert or controlled atmospheres, effectively preventing substrate oxidation.
2. High purity
Produced by chemical vapor deposition (CVD) under high-temperature chlorination conditions, ensuring ultra-high purity and suitability for semiconductor-grade applications.
3. Erosion and wear resistance
High hardness and dense microstructure provide excellent resistance to particle erosion, mechanical wear, and process gas attack.
4. Chemical corrosion resistance
Excellent resistance to acids, alkalis, salts, and a wide range of organic chemical reagents, ensuring long-term stability in harsh environments.
5. Dense and uniform coating structure
Pinhole-free surface with strong adhesion to the substrate, minimizing particle generation and contamination risk.
6. Long service life
Effectively extends the lifespan of graphite and ceramic components in high-temperature industrial processes.
| SIC-CVDプロパティ | ||
| 結晶構造 | FCCβ相 | |
| 密度 | g/cm³ | 3.21 |
| 硬度 | ビッカーズの硬さ | 2500 |
| 穀物サイズ | mm | 2~10 |
| 化学純度 | % | 99.99995 |
| 熱容量 | J・kg-1・k-1 | 640 |
| 昇華温度 | ℃ | 2700 |
| フェレキュラルの強さ | MPA（RT 4ポイント） | 415 |
| Young’s modulus | GPA（4ptベンド、1300℃） | 430 |
| 熱膨張（CTE） | 10-6K-1 | 4.5 |
| 熱伝導率 | （w/mk） | 300 |
