SiC cantilever paddle silicon carbide diffusion paddle

Silicon carbide paddle, also known as silicon carbide cantilever paddle, silicon carbide cantilever beam is a kind of silicon carbide ceramic products after 1850℃ high temperature sintering, but high temperature sintering silicon carbide ceramic is a special ceramic products, by fine particles α-SiC and additives pressed into a blank, in contact with liquid silicon at high temperature, carbon in the blank and infiltration of Si reaction, the formation of β-SiC, And combined with α-SiC, free silicon filled the porosity, so as to obtain high density ceramic materials; It has various superior properties of industrial ceramics.

Semicera’s SiC paddles are engineered for minimal thermal expansion, providing stability and precision in processes where dimensional accuracy is critical. This makes them ideal for applications where wafers are subjected to repeated heating and cooling cycles, as the wafer boat maintains its structural integrity, ensuring consistent performance.

Incorporating Semicera’s silicon carbide diffusion paddles into your production line will enhance your process’s reliability, thanks to their superior thermal and chemical properties. These paddles are perfect for diffusion, oxidation, and annealing processes, ensuring that wafers are handled with care and precision throughout each step. 

Innovation is at the core of Semicera’s SiC paddle design. These paddles are tailored to fit seamlessly into existing semiconductor equipment, providing enhanced handling efficiency. The lightweight structure and ergonomic design not only improve wafer transport but also reduce operational downtime, resulting in streamlined production.

 

Fizyczne właściwości rekrystalizowanego węgliku krzemu

Nieruchomość

Typowa wartość

Working temperature (°C)

1600°C (with oxygen), 1700°C (reducing environment)

Treść sic

> 99.96%

Darmowa zawartość SI

<0,1%

Gęstość luzem

2.60-2.70 g/cm3

Pozorna porowatość

<16%

Compression strength

> 600 MPa

Zimna siła zginania

80-90 MPa (20°C)

Gorąca siła zginania

90-100 MPa (1400°C)

Thermal expansion @1500°C

4.70 10-6/°C

Thermal conductivity @1200°C

23  W/m•K

Moduł sprężystości

240 GPA

Odporność na wstrząsy termiczne

Niezwykle dobry

Paddle wspornikowe (3)

Cantilever Paddle (21)

fd658ca43ee41331d035aad94b7a9cc

Miejsce pracy półcesy

Półcera robocza miejsce 2

Maszyna sprzętu

Przetwarzanie CNN, czyszczenie chemiczne, powłoka CVD

Semicera Ware House

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