SiC cantilever paddle silicon carbide diffusion paddle

Silicon carbide paddle, also known as silicon carbide cantilever paddle, silicon carbide cantilever beam is a kind of silicon carbide ceramic products after 1850℃ high temperature sintering, but high temperature sintering silicon carbide ceramic is a special ceramic products, by fine particles α-SiC and additives pressed into a blank, in contact with liquid silicon at high temperature, carbon in the blank and Infiltração da reação SI, a formação de β-SIC e combinada com α-SiC, o silício livre encheu a porosidade, de modo a obter materiais cerâmicos de alta densidade; Possui várias propriedades superiores da cerâmica industrial.

Semicera SiC paddles are engineered for minimal thermal expansion, providing stability and precision in processes where dimensional accuracy is critical. This makes them ideal for applications where bolachas are subjected to repeated heating and cooling cycles, as the wafer boat maintains its structural integrity, ensuring consistent performance.

Incorporating Semicera’s silicon carbide diffusion paddles into your production line will enhance your process’s reliability, thanks to their superior thermal and chemical properties. These paddles are perfect for diffusion, oxidation, and annealing processes, ensuring that wafers are handled with care and precision throughout each step. 

Innovation is at the core of Semicera’s SiC paddle design. These paddles are tailored to fit seamlessly into existing semiconductor equipment, providing enhanced handling efficiency. The lightweight structure and ergonomic design not only improve wafer transport but also reduce operational downtime, resulting in streamlined production.

 

Propriedades físicas de carboneto de silício recristalizado

Propriedade

Valor típico

Temperatura de trabalho (° C)

1600 ° C (com oxigênio), 1700 ° C (redução do ambiente)

Conteúdo sic

> 99.96%

Conteúdo SI gratuito

<0.1%

Densidade a granel

2.60-2.70 g/cm3

Porosidade aparente

<16%

Força de compressão

> 600 MPa

Força de flexão fria

80-90 MPa (20 ° C)

Força de flexão quente

90-100 MPa (1400 ° C)

Expansão térmica a 1500 ° C.

4.70 10-6/° c

Condutividade térmica a 1200 ° C.

23 w/m • k

Módulo elástico

240 GPA

Resistência ao choque térmico

Extremamente bom

Cantilever paddle (3)

Cantilever Paddle (21)

fd658ca43ee41331d035aad94b7a9cc

Local de trabalho semicera

Local de trabalho semicera 2

Máquina de equipamentos

Processamento da CNN, limpeza química, revestimento de CVD

Ware House Semicera

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